1/16/2013	10:23:03 AM	Main Vac valve closed
1/16/2013	10:23:17 AM	Main Vac valve opened
1/16/2013	10:23:42 AM	Recipe started at 10:23 AM
1/16/2013	10:23:42 AM	Helium valve closed
1/16/2013	10:23:42 AM	H2 valve closed
1/16/2013	10:23:42 AM	BCl3 valve closed
1/16/2013	10:23:42 AM	PH3 valve closed
1/16/2013	10:23:42 AM	SiCl4 pre valve closed
1/16/2013	10:23:42 AM	SiCl4 post valve closed
1/16/2013	10:23:42 AM	Main Vac valve closed
1/16/2013	10:23:42 AM	Bypass valve closed
1/16/2013	10:23:42 AM	Bubbler valve closed
1/16/2013	10:23:42 AM	Helium MFC set to  0.000000
1/16/2013	10:23:42 AM	H2 MFC set to  0.000000
1/16/2013	10:23:42 AM	BCl3 MFC set to  0.000000
1/16/2013	10:23:42 AM	PH3 MFC set to  0.000000
1/16/2013	10:23:42 AM	SiCl4 MFC set to  0.000000
1/16/2013	10:23:42 AM	Bypass solenoid MFC set to  0.000000
1/16/2013	10:23:42 AM	Tube furnace set to 0
1/16/2013	10:23:45 AM	Helium valve closed
1/16/2013	10:23:45 AM	BCl3 valve closed
1/16/2013	10:23:45 AM	PH3 valve closed
1/16/2013	10:23:45 AM	SiCl4 pre valve closed
1/16/2013	10:23:45 AM	SiCl4 post valve closed
1/16/2013	10:23:45 AM	Main Vac valve closed
1/16/2013	10:23:45 AM	Bypass valve closed
1/16/2013	10:23:45 AM	Bubbler valve closed
1/16/2013	10:23:45 AM	H2 valve opened
1/16/2013	10:23:45 AM	Helium MFC set to  0.000000
1/16/2013	10:23:45 AM	H2 MFC set to  500.000000
1/16/2013	10:23:45 AM	BCl3 MFC set to  0.000000
1/16/2013	10:23:45 AM	PH3 MFC set to  0.000000
1/16/2013	10:23:45 AM	SiCl4 MFC set to  0.000000
1/16/2013	10:23:45 AM	Bypass solenoid MFC set to  0.000000
1/16/2013	10:23:45 AM	Tube furnace set to 0
1/16/2013	10:25:01 AM	Helium valve closed
1/16/2013	10:25:01 AM	BCl3 valve closed
1/16/2013	10:25:01 AM	PH3 valve closed
1/16/2013	10:25:01 AM	SiCl4 pre valve closed
1/16/2013	10:25:01 AM	SiCl4 post valve closed
1/16/2013	10:25:01 AM	Main Vac valve closed
1/16/2013	10:25:01 AM	Bypass valve closed
1/16/2013	10:25:01 AM	H2 valve opened
1/16/2013	10:25:01 AM	Bubbler valve opened
1/16/2013	10:25:01 AM	Helium MFC set to  0.000000
1/16/2013	10:25:01 AM	H2 MFC set to  500.000000
1/16/2013	10:25:01 AM	BCl3 MFC set to  0.000000
1/16/2013	10:25:01 AM	PH3 MFC set to  0.000000
1/16/2013	10:25:01 AM	SiCl4 MFC set to  0.000000
1/16/2013	10:25:01 AM	Bypass solenoid MFC set to  0.000000
1/16/2013	10:25:01 AM	Tube furnace set to 0
1/16/2013	10:25:02 AM	Helium valve closed
1/16/2013	10:25:02 AM	BCl3 valve closed
1/16/2013	10:25:02 AM	PH3 valve closed
1/16/2013	10:25:02 AM	SiCl4 pre valve closed
1/16/2013	10:25:02 AM	SiCl4 post valve closed
1/16/2013	10:25:02 AM	Main Vac valve closed
1/16/2013	10:25:02 AM	Bypass valve closed
1/16/2013	10:25:02 AM	H2 valve opened
1/16/2013	10:25:02 AM	Bubbler valve opened
1/16/2013	10:25:02 AM	Helium MFC set to  0.000000
1/16/2013	10:25:02 AM	H2 MFC set to  500.000000
1/16/2013	10:25:03 AM	BCl3 MFC set to  0.000000
1/16/2013	10:25:03 AM	PH3 MFC set to  0.000000
1/16/2013	10:25:03 AM	SiCl4 MFC set to  0.000000
1/16/2013	10:25:03 AM	Bypass solenoid MFC set to  0.000000
1/16/2013	10:25:03 AM	Tube furnace set to 1000
1/16/2013	10:45:03 AM	Helium valve closed
1/16/2013	10:45:03 AM	PH3 valve closed
1/16/2013	10:45:03 AM	Main Vac valve closed
1/16/2013	10:45:03 AM	Bypass valve closed
1/16/2013	10:45:03 AM	H2 valve opened
1/16/2013	10:45:03 AM	BCl3 valve opened
1/16/2013	10:45:03 AM	SiCl4 pre valve opened
1/16/2013	10:45:03 AM	SiCl4 post valve opened
1/16/2013	10:45:03 AM	Bubbler valve opened
1/16/2013	10:45:03 AM	Helium MFC set to  0.000000
1/16/2013	10:45:03 AM	H2 MFC set to  450.000000
1/16/2013	10:45:03 AM	BCl3 MFC set to  1.300000
1/16/2013	10:45:03 AM	PH3 MFC set to  0.000000
1/16/2013	10:45:03 AM	SiCl4 MFC set to  50.000000
1/16/2013	10:45:03 AM	Bypass solenoid MFC set to  0.000000
1/16/2013	10:45:03 AM	Tube furnace set to 1000
1/16/2013	10:59:03 AM	Helium valve closed
1/16/2013	10:59:03 AM	BCl3 valve closed
1/16/2013	10:59:03 AM	PH3 valve closed
1/16/2013	10:59:03 AM	SiCl4 pre valve closed
1/16/2013	10:59:03 AM	SiCl4 post valve closed
1/16/2013	10:59:03 AM	Main Vac valve closed
1/16/2013	10:59:03 AM	Bypass valve closed
1/16/2013	10:59:03 AM	H2 valve opened
1/16/2013	10:59:03 AM	Bubbler valve opened
1/16/2013	10:59:03 AM	Helium MFC set to  0.000000
1/16/2013	10:59:03 AM	H2 MFC set to  500.000000
1/16/2013	10:59:03 AM	BCl3 MFC set to  0.000000
1/16/2013	10:59:03 AM	PH3 MFC set to  0.000000
1/16/2013	10:59:03 AM	SiCl4 MFC set to  0.000000
1/16/2013	10:59:03 AM	Bypass solenoid MFC set to  0.000000
1/16/2013	10:59:03 AM	Tube furnace set to 750
1/16/2013	11:04:03 AM	H2 valve closed
1/16/2013	11:04:03 AM	BCl3 valve closed
1/16/2013	11:04:03 AM	PH3 valve closed
1/16/2013	11:04:03 AM	SiCl4 pre valve closed
1/16/2013	11:04:03 AM	SiCl4 post valve closed
1/16/2013	11:04:03 AM	Main Vac valve closed
1/16/2013	11:04:03 AM	Bypass valve closed
1/16/2013	11:04:03 AM	Helium valve opened
1/16/2013	11:04:03 AM	Bubbler valve opened
1/16/2013	11:04:03 AM	Helium MFC set to  500.000000
1/16/2013	11:04:03 AM	H2 MFC set to  0.000000
1/16/2013	11:04:03 AM	BCl3 MFC set to  0.000000
1/16/2013	11:04:03 AM	PH3 MFC set to  0.000000
1/16/2013	11:04:03 AM	SiCl4 MFC set to  0.000000
1/16/2013	11:04:03 AM	Bypass solenoid MFC set to  0.000000
1/16/2013	11:04:03 AM	Tube furnace set to 0
1/16/2013	11:24:04 AM	Helium valve closed
1/16/2013	11:24:04 AM	H2 valve closed
1/16/2013	11:24:04 AM	BCl3 valve closed
1/16/2013	11:24:04 AM	PH3 valve closed
1/16/2013	11:24:04 AM	SiCl4 pre valve closed
1/16/2013	11:24:04 AM	SiCl4 post valve closed
1/16/2013	11:24:04 AM	Main Vac valve closed
1/16/2013	11:24:04 AM	Bypass valve closed
1/16/2013	11:24:04 AM	Bubbler valve closed
1/16/2013	11:24:04 AM	Helium MFC set to  0.000000
1/16/2013	11:24:04 AM	H2 MFC set to  0.000000
1/16/2013	11:24:04 AM	BCl3 MFC set to  0.000000
1/16/2013	11:24:04 AM	PH3 MFC set to  0.000000
1/16/2013	11:24:04 AM	SiCl4 MFC set to  0.000000
1/16/2013	11:24:04 AM	Bypass solenoid MFC set to  0.000000
1/16/2013	11:24:04 AM	Tube furnace set to 0
1/16/2013	11:24:05 AM	Run finished at 11:24 AM
1/16/2013	11:27:41 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/16/2013	11:27:42 AM	Recipe started at 11:27 AM
1/16/2013	11:27:42 AM	Helium valve closed
1/16/2013	11:27:42 AM	H2 valve closed
1/16/2013	11:27:42 AM	BCl3 valve closed
1/16/2013	11:27:42 AM	PH3 valve closed
1/16/2013	11:27:42 AM	SiCl4 pre valve closed
1/16/2013	11:27:42 AM	SiCl4 post valve closed
1/16/2013	11:27:42 AM	Main Vac valve closed
1/16/2013	11:27:42 AM	Bypass valve closed
1/16/2013	11:27:42 AM	Bubbler valve closed
1/16/2013	11:27:42 AM	Helium MFC set to  0.000000
1/16/2013	11:27:42 AM	H2 MFC set to  0.000000
1/16/2013	11:27:42 AM	BCl3 MFC set to  0.000000
1/16/2013	11:27:42 AM	PH3 MFC set to  0.000000
1/16/2013	11:27:42 AM	SiCl4 MFC set to  0.000000
1/16/2013	11:27:42 AM	Bypass solenoid MFC set to  0.000000
1/16/2013	11:27:42 AM	Tube furnace set to 0
1/16/2013	11:27:45 AM	H2 valve closed
1/16/2013	11:27:45 AM	BCl3 valve closed
1/16/2013	11:27:45 AM	PH3 valve closed
1/16/2013	11:27:45 AM	SiCl4 pre valve closed
1/16/2013	11:27:45 AM	SiCl4 post valve closed
1/16/2013	11:27:45 AM	Main Vac valve closed
1/16/2013	11:27:45 AM	Bypass valve closed
1/16/2013	11:27:45 AM	Bubbler valve closed
1/16/2013	11:27:45 AM	Helium valve opened
1/16/2013	11:27:45 AM	Helium MFC set to  500.000000
1/16/2013	11:27:45 AM	H2 MFC set to  0.000000
1/16/2013	11:27:45 AM	BCl3 MFC set to  0.000000
1/16/2013	11:27:45 AM	PH3 MFC set to  0.000000
1/16/2013	11:27:45 AM	SiCl4 MFC set to  0.000000
1/16/2013	11:27:45 AM	Bypass solenoid MFC set to  0.000000
1/16/2013	11:27:45 AM	Tube furnace set to 0
1/16/2013	11:27:45 AM	Helium valve closed
1/16/2013	11:27:45 AM	H2 valve closed
1/16/2013	11:27:45 AM	BCl3 valve closed
1/16/2013	11:27:45 AM	PH3 valve closed
1/16/2013	11:27:45 AM	SiCl4 pre valve closed
1/16/2013	11:27:45 AM	SiCl4 post valve closed
1/16/2013	11:27:45 AM	Main Vac valve closed
1/16/2013	11:27:45 AM	Bypass valve closed
1/16/2013	11:27:45 AM	Bubbler valve closed
1/16/2013	11:27:45 AM	Helium MFC set to  0.000000
1/16/2013	11:27:45 AM	H2 MFC set to  0.000000
1/16/2013	11:27:45 AM	BCl3 MFC set to  0.000000
1/16/2013	11:27:45 AM	PH3 MFC set to  0.000000
1/16/2013	11:27:45 AM	SiCl4 MFC set to  0.000000
1/16/2013	11:27:45 AM	Bypass solenoid MFC set to  0.000000
1/16/2013	11:27:46 AM	Tube furnace set to 0
1/16/2013	11:27:47 AM	Run finished at 11:27 AM
1/16/2013	11:27:47 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/16/2013	11:30:57 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/16/2013	11:30:57 AM	Recipe started at 11:30 AM
1/16/2013	11:30:57 AM	Helium valve closed
1/16/2013	11:30:57 AM	H2 valve closed
1/16/2013	11:30:57 AM	BCl3 valve closed
1/16/2013	11:30:57 AM	PH3 valve closed
1/16/2013	11:30:57 AM	SiCl4 pre valve closed
1/16/2013	11:30:57 AM	SiCl4 post valve closed
1/16/2013	11:30:57 AM	Main Vac valve closed
1/16/2013	11:30:57 AM	Bubbler valve closed
1/16/2013	11:30:58 AM	Bypass valve opened
1/16/2013	11:30:58 AM	Helium MFC set to  0.000000
1/16/2013	11:30:58 AM	H2 MFC set to  0.000000
1/16/2013	11:30:58 AM	BCl3 MFC set to  0.000000
1/16/2013	11:30:58 AM	PH3 MFC set to  0.000000
1/16/2013	11:30:58 AM	SiCl4 MFC set to  0.000000
1/16/2013	11:30:58 AM	Bypass solenoid MFC set to  0.000000
1/16/2013	11:30:58 AM	Tube furnace set to 0
1/16/2013	11:32:14 AM	Helium valve closed
1/16/2013	11:32:14 AM	H2 valve closed
1/16/2013	11:32:14 AM	BCl3 valve closed
1/16/2013	11:32:14 AM	PH3 valve closed
1/16/2013	11:32:14 AM	SiCl4 pre valve closed
1/16/2013	11:32:14 AM	SiCl4 post valve closed
1/16/2013	11:32:14 AM	Main Vac valve closed
1/16/2013	11:32:14 AM	Bubbler valve closed
1/16/2013	11:32:14 AM	Bypass valve opened
1/16/2013	11:32:15 AM	Helium MFC set to  0.000000
1/16/2013	11:32:15 AM	H2 MFC set to  0.000000
1/16/2013	11:32:15 AM	BCl3 MFC set to  0.000000
1/16/2013	11:32:15 AM	PH3 MFC set to  0.000000
1/16/2013	11:32:15 AM	SiCl4 MFC set to  0.000000
1/16/2013	11:32:15 AM	Bypass solenoid MFC set to  0.000000
1/16/2013	11:32:15 AM	Tube furnace set to 0
1/16/2013	11:33:15 AM	Helium valve closed
1/16/2013	11:33:15 AM	H2 valve closed
1/16/2013	11:33:15 AM	BCl3 valve closed
1/16/2013	11:33:15 AM	PH3 valve closed
1/16/2013	11:33:15 AM	SiCl4 pre valve closed
1/16/2013	11:33:15 AM	SiCl4 post valve closed
1/16/2013	11:33:15 AM	Bypass valve closed
1/16/2013	11:33:15 AM	Bubbler valve closed
1/16/2013	11:33:15 AM	Main Vac valve opened
1/16/2013	11:33:15 AM	Helium MFC set to  0.000000
1/16/2013	11:33:15 AM	H2 MFC set to  0.000000
1/16/2013	11:33:15 AM	BCl3 MFC set to  0.000000
1/16/2013	11:33:15 AM	PH3 MFC set to  0.000000
1/16/2013	11:33:15 AM	SiCl4 MFC set to  0.000000
1/16/2013	11:33:15 AM	Bypass solenoid MFC set to  0.000000
1/16/2013	11:33:15 AM	Tube furnace set to 0
1/16/2013	11:33:16 AM	Run finished at 11:33 AM
1/16/2013	11:33:16 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/16/2013	11:54:09 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
1/16/2013	11:54:16 AM	Recipe started at 11:54 AM
1/16/2013	11:54:16 AM	Helium valve closed
1/16/2013	11:54:16 AM	H2 valve closed
1/16/2013	11:54:16 AM	BCl3 valve closed
1/16/2013	11:54:16 AM	PH3 valve closed
1/16/2013	11:54:16 AM	SiCl4 pre valve closed
1/16/2013	11:54:16 AM	SiCl4 post valve closed
1/16/2013	11:54:16 AM	Main Vac valve closed
1/16/2013	11:54:16 AM	Bubbler valve closed
1/16/2013	11:54:16 AM	Bypass valve opened
1/16/2013	11:54:16 AM	Helium MFC set to  0.000000
1/16/2013	11:54:16 AM	H2 MFC set to  0.000000
1/16/2013	11:54:16 AM	BCl3 MFC set to  0.000000
1/16/2013	11:54:16 AM	PH3 MFC set to  0.000000
1/16/2013	11:54:16 AM	SiCl4 MFC set to  0.000000
1/16/2013	11:54:16 AM	Bypass solenoid MFC set to  0.000000
1/16/2013	11:54:16 AM	Tube furnace set to 0
1/16/2013	11:54:16 AM	Helium valve closed
1/16/2013	11:54:16 AM	H2 valve closed
1/16/2013	11:54:16 AM	BCl3 valve closed
1/16/2013	11:54:16 AM	PH3 valve closed
1/16/2013	11:54:16 AM	SiCl4 pre valve closed
1/16/2013	11:54:16 AM	SiCl4 post valve closed
1/16/2013	11:54:16 AM	Main Vac valve closed
1/16/2013	11:54:16 AM	Bubbler valve closed
1/16/2013	11:54:16 AM	Bypass valve opened
1/16/2013	11:54:16 AM	Helium MFC set to  0.000000
1/16/2013	11:54:16 AM	H2 MFC set to  0.000000
1/16/2013	11:54:16 AM	BCl3 MFC set to  0.000000
1/16/2013	11:54:16 AM	PH3 MFC set to  0.000000
1/16/2013	11:54:16 AM	SiCl4 MFC set to  0.000000
1/16/2013	11:54:16 AM	Bypass solenoid MFC set to  0.000000
1/16/2013	11:54:16 AM	Tube furnace set to 0
1/16/2013	11:54:17 AM	Helium valve closed
1/16/2013	11:54:17 AM	H2 valve closed
1/16/2013	11:54:17 AM	BCl3 valve closed
1/16/2013	11:54:17 AM	PH3 valve closed
1/16/2013	11:54:17 AM	SiCl4 pre valve closed
1/16/2013	11:54:17 AM	SiCl4 post valve closed
1/16/2013	11:54:17 AM	Bypass valve closed
1/16/2013	11:54:17 AM	Bubbler valve closed
1/16/2013	11:54:17 AM	Main Vac valve opened
1/16/2013	11:54:17 AM	Helium MFC set to  0.000000
1/16/2013	11:54:17 AM	H2 MFC set to  0.000000
1/16/2013	11:54:17 AM	BCl3 MFC set to  0.000000
1/16/2013	11:54:17 AM	PH3 MFC set to  0.000000
1/16/2013	11:54:17 AM	SiCl4 MFC set to  0.000000
1/16/2013	11:54:17 AM	Bypass solenoid MFC set to  0.000000
1/16/2013	11:54:18 AM	Tube furnace set to 0
1/16/2013	11:54:48 AM	H2 valve closed
1/16/2013	11:54:48 AM	BCl3 valve closed
1/16/2013	11:54:48 AM	PH3 valve closed
1/16/2013	11:54:48 AM	SiCl4 pre valve closed
1/16/2013	11:54:48 AM	SiCl4 post valve closed
1/16/2013	11:54:48 AM	Bypass valve closed
1/16/2013	11:54:48 AM	Bubbler valve closed
1/16/2013	11:54:48 AM	Helium valve opened
1/16/2013	11:54:48 AM	Main Vac valve opened
1/16/2013	11:54:48 AM	Helium MFC set to  20.000000
1/16/2013	11:54:48 AM	H2 MFC set to  0.000000
1/16/2013	11:54:48 AM	BCl3 MFC set to  0.000000
1/16/2013	11:54:48 AM	PH3 MFC set to  0.000000
1/16/2013	11:54:48 AM	SiCl4 MFC set to  0.000000
1/16/2013	11:54:48 AM	Bypass solenoid MFC set to  0.000000
1/16/2013	11:54:48 AM	Tube furnace set to 0
1/16/2013	11:55:18 AM	Helium valve closed
1/16/2013	11:55:18 AM	H2 valve closed
1/16/2013	11:55:18 AM	BCl3 valve closed
1/16/2013	11:55:18 AM	PH3 valve closed
1/16/2013	11:55:18 AM	SiCl4 pre valve closed
1/16/2013	11:55:18 AM	SiCl4 post valve closed
1/16/2013	11:55:18 AM	Bypass valve closed
1/16/2013	11:55:18 AM	Bubbler valve closed
1/16/2013	11:55:18 AM	Main Vac valve opened
1/16/2013	11:55:18 AM	Helium MFC set to  0.000000
1/16/2013	11:55:18 AM	H2 MFC set to  0.000000
1/16/2013	11:55:18 AM	BCl3 MFC set to  0.000000
1/16/2013	11:55:18 AM	PH3 MFC set to  0.000000
1/16/2013	11:55:18 AM	SiCl4 MFC set to  0.000000
1/16/2013	11:55:18 AM	Bypass solenoid MFC set to  0.000000
1/16/2013	11:55:18 AM	Tube furnace set to 0
1/16/2013	11:55:48 AM	H2 valve closed
1/16/2013	11:55:48 AM	BCl3 valve closed
1/16/2013	11:55:48 AM	PH3 valve closed
1/16/2013	11:55:48 AM	SiCl4 pre valve closed
1/16/2013	11:55:48 AM	SiCl4 post valve closed
1/16/2013	11:55:48 AM	Bypass valve closed
1/16/2013	11:55:48 AM	Bubbler valve closed
1/16/2013	11:55:48 AM	Helium valve opened
1/16/2013	11:55:48 AM	Main Vac valve opened
1/16/2013	11:55:48 AM	Helium MFC set to  20.000000
1/16/2013	11:55:48 AM	H2 MFC set to  0.000000
1/16/2013	11:55:48 AM	BCl3 MFC set to  0.000000
1/16/2013	11:55:48 AM	PH3 MFC set to  0.000000
1/16/2013	11:55:48 AM	SiCl4 MFC set to  0.000000
1/16/2013	11:55:48 AM	Bypass solenoid MFC set to  0.000000
1/16/2013	11:55:48 AM	Tube furnace set to 0
1/16/2013	11:56:18 AM	Helium valve closed
1/16/2013	11:56:18 AM	H2 valve closed
1/16/2013	11:56:18 AM	BCl3 valve closed
1/16/2013	11:56:18 AM	PH3 valve closed
1/16/2013	11:56:18 AM	SiCl4 pre valve closed
1/16/2013	11:56:18 AM	SiCl4 post valve closed
1/16/2013	11:56:18 AM	Bypass valve closed
1/16/2013	11:56:18 AM	Bubbler valve closed
1/16/2013	11:56:18 AM	Main Vac valve opened
1/16/2013	11:56:18 AM	Helium MFC set to  0.000000
1/16/2013	11:56:18 AM	H2 MFC set to  0.000000
1/16/2013	11:56:18 AM	BCl3 MFC set to  0.000000
1/16/2013	11:56:18 AM	PH3 MFC set to  0.000000
1/16/2013	11:56:18 AM	SiCl4 MFC set to  0.000000
1/16/2013	11:56:18 AM	Bypass solenoid MFC set to  0.000000
1/16/2013	11:56:19 AM	Tube furnace set to 0
1/16/2013	11:56:49 AM	H2 valve closed
1/16/2013	11:56:49 AM	BCl3 valve closed
1/16/2013	11:56:49 AM	PH3 valve closed
1/16/2013	11:56:49 AM	SiCl4 pre valve closed
1/16/2013	11:56:49 AM	SiCl4 post valve closed
1/16/2013	11:56:49 AM	Bypass valve closed
1/16/2013	11:56:49 AM	Bubbler valve closed
1/16/2013	11:56:49 AM	Helium valve opened
1/16/2013	11:56:49 AM	Main Vac valve opened
1/16/2013	11:56:49 AM	Helium MFC set to  20.000000
1/16/2013	11:56:49 AM	H2 MFC set to  0.000000
1/16/2013	11:56:49 AM	BCl3 MFC set to  0.000000
1/16/2013	11:56:49 AM	PH3 MFC set to  0.000000
1/16/2013	11:56:49 AM	SiCl4 MFC set to  0.000000
1/16/2013	11:56:49 AM	Bypass solenoid MFC set to  0.000000
1/16/2013	11:56:49 AM	Tube furnace set to 0
1/16/2013	11:57:19 AM	Helium valve closed
1/16/2013	11:57:19 AM	H2 valve closed
1/16/2013	11:57:19 AM	BCl3 valve closed
1/16/2013	11:57:19 AM	PH3 valve closed
1/16/2013	11:57:19 AM	SiCl4 pre valve closed
1/16/2013	11:57:19 AM	SiCl4 post valve closed
1/16/2013	11:57:19 AM	Bypass valve closed
1/16/2013	11:57:19 AM	Bubbler valve closed
1/16/2013	11:57:19 AM	Main Vac valve opened
1/16/2013	11:57:19 AM	Helium MFC set to  0.000000
1/16/2013	11:57:19 AM	H2 MFC set to  0.000000
1/16/2013	11:57:19 AM	BCl3 MFC set to  0.000000
1/16/2013	11:57:19 AM	PH3 MFC set to  0.000000
1/16/2013	11:57:19 AM	SiCl4 MFC set to  0.000000
1/16/2013	11:57:19 AM	Bypass solenoid MFC set to  0.000000
1/16/2013	11:57:19 AM	Tube furnace set to 0
1/16/2013	11:57:49 AM	H2 valve closed
1/16/2013	11:57:49 AM	BCl3 valve closed
1/16/2013	11:57:49 AM	PH3 valve closed
1/16/2013	11:57:49 AM	SiCl4 pre valve closed
1/16/2013	11:57:49 AM	SiCl4 post valve closed
1/16/2013	11:57:49 AM	Bypass valve closed
1/16/2013	11:57:49 AM	Bubbler valve closed
1/16/2013	11:57:49 AM	Helium valve opened
1/16/2013	11:57:49 AM	Main Vac valve opened
1/16/2013	11:57:49 AM	Helium MFC set to  20.000000
1/16/2013	11:57:49 AM	H2 MFC set to  0.000000
1/16/2013	11:57:49 AM	BCl3 MFC set to  0.000000
1/16/2013	11:57:49 AM	PH3 MFC set to  0.000000
1/16/2013	11:57:49 AM	SiCl4 MFC set to  0.000000
1/16/2013	11:57:49 AM	Bypass solenoid MFC set to  0.000000
1/16/2013	11:57:49 AM	Tube furnace set to 0
1/16/2013	11:58:19 AM	Helium valve closed
1/16/2013	11:58:19 AM	H2 valve closed
1/16/2013	11:58:19 AM	BCl3 valve closed
1/16/2013	11:58:19 AM	PH3 valve closed
1/16/2013	11:58:19 AM	SiCl4 pre valve closed
1/16/2013	11:58:19 AM	SiCl4 post valve closed
1/16/2013	11:58:19 AM	Bypass valve closed
1/16/2013	11:58:19 AM	Bubbler valve closed
1/16/2013	11:58:19 AM	Main Vac valve opened
1/16/2013	11:58:19 AM	Helium MFC set to  0.000000
1/16/2013	11:58:19 AM	H2 MFC set to  0.000000
1/16/2013	11:58:19 AM	BCl3 MFC set to  0.000000
1/16/2013	11:58:19 AM	PH3 MFC set to  0.000000
1/16/2013	11:58:19 AM	SiCl4 MFC set to  0.000000
1/16/2013	11:58:19 AM	Bypass solenoid MFC set to  0.000000
1/16/2013	11:58:20 AM	Tube furnace set to 0
1/16/2013	11:58:50 AM	H2 valve closed
1/16/2013	11:58:50 AM	BCl3 valve closed
1/16/2013	11:58:50 AM	PH3 valve closed
1/16/2013	11:58:50 AM	SiCl4 pre valve closed
1/16/2013	11:58:50 AM	SiCl4 post valve closed
1/16/2013	11:58:50 AM	Bypass valve closed
1/16/2013	11:58:50 AM	Bubbler valve closed
1/16/2013	11:58:50 AM	Helium valve opened
1/16/2013	11:58:50 AM	Main Vac valve opened
1/16/2013	11:58:50 AM	Helium MFC set to  20.000000
1/16/2013	11:58:50 AM	H2 MFC set to  0.000000
1/16/2013	11:58:50 AM	BCl3 MFC set to  0.000000
1/16/2013	11:58:50 AM	PH3 MFC set to  0.000000
1/16/2013	11:58:50 AM	SiCl4 MFC set to  0.000000
1/16/2013	11:58:50 AM	Bypass solenoid MFC set to  0.000000
1/16/2013	11:58:50 AM	Tube furnace set to 0
1/16/2013	11:59:20 AM	Helium valve closed
1/16/2013	11:59:20 AM	H2 valve closed
1/16/2013	11:59:20 AM	BCl3 valve closed
1/16/2013	11:59:20 AM	PH3 valve closed
1/16/2013	11:59:20 AM	SiCl4 pre valve closed
1/16/2013	11:59:20 AM	SiCl4 post valve closed
1/16/2013	11:59:20 AM	Bypass valve closed
1/16/2013	11:59:20 AM	Bubbler valve closed
1/16/2013	11:59:20 AM	Main Vac valve opened
1/16/2013	11:59:20 AM	Helium MFC set to  0.000000
1/16/2013	11:59:20 AM	H2 MFC set to  0.000000
1/16/2013	11:59:20 AM	BCl3 MFC set to  0.000000
1/16/2013	11:59:20 AM	PH3 MFC set to  0.000000
1/16/2013	11:59:20 AM	SiCl4 MFC set to  0.000000
1/16/2013	11:59:20 AM	Bypass solenoid MFC set to  0.000000
1/16/2013	11:59:20 AM	Tube furnace set to 0
1/16/2013	11:59:50 AM	H2 valve closed
1/16/2013	11:59:50 AM	BCl3 valve closed
1/16/2013	11:59:50 AM	PH3 valve closed
1/16/2013	11:59:50 AM	SiCl4 pre valve closed
1/16/2013	11:59:50 AM	SiCl4 post valve closed
1/16/2013	11:59:50 AM	Bypass valve closed
1/16/2013	11:59:50 AM	Bubbler valve closed
1/16/2013	11:59:50 AM	Helium valve opened
1/16/2013	11:59:50 AM	Main Vac valve opened
1/16/2013	11:59:50 AM	Helium MFC set to  20.000000
1/16/2013	11:59:50 AM	H2 MFC set to  0.000000
1/16/2013	11:59:50 AM	BCl3 MFC set to  0.000000
1/16/2013	11:59:50 AM	PH3 MFC set to  0.000000
1/16/2013	11:59:50 AM	SiCl4 MFC set to  0.000000
1/16/2013	11:59:50 AM	Bypass solenoid MFC set to  0.000000
1/16/2013	11:59:50 AM	Tube furnace set to 0
1/16/2013	12:00:20 PM	Helium valve closed
1/16/2013	12:00:20 PM	H2 valve closed
1/16/2013	12:00:20 PM	BCl3 valve closed
1/16/2013	12:00:20 PM	PH3 valve closed
1/16/2013	12:00:20 PM	SiCl4 pre valve closed
1/16/2013	12:00:20 PM	SiCl4 post valve closed
1/16/2013	12:00:20 PM	Bypass valve closed
1/16/2013	12:00:20 PM	Bubbler valve closed
1/16/2013	12:00:20 PM	Main Vac valve opened
1/16/2013	12:00:20 PM	Helium MFC set to  0.000000
1/16/2013	12:00:20 PM	H2 MFC set to  0.000000
1/16/2013	12:00:20 PM	BCl3 MFC set to  0.000000
1/16/2013	12:00:20 PM	PH3 MFC set to  0.000000
1/16/2013	12:00:20 PM	SiCl4 MFC set to  0.000000
1/16/2013	12:00:20 PM	Bypass solenoid MFC set to  0.000000
1/16/2013	12:00:21 PM	Tube furnace set to 0
1/16/2013	12:00:51 PM	H2 valve closed
1/16/2013	12:00:51 PM	BCl3 valve closed
1/16/2013	12:00:51 PM	PH3 valve closed
1/16/2013	12:00:51 PM	SiCl4 pre valve closed
1/16/2013	12:00:51 PM	SiCl4 post valve closed
1/16/2013	12:00:51 PM	Bypass valve closed
1/16/2013	12:00:51 PM	Bubbler valve closed
1/16/2013	12:00:51 PM	Helium valve opened
1/16/2013	12:00:51 PM	Main Vac valve opened
1/16/2013	12:00:51 PM	Helium MFC set to  20.000000
1/16/2013	12:00:51 PM	H2 MFC set to  0.000000
1/16/2013	12:00:51 PM	BCl3 MFC set to  0.000000
1/16/2013	12:00:51 PM	PH3 MFC set to  0.000000
1/16/2013	12:00:51 PM	SiCl4 MFC set to  0.000000
1/16/2013	12:00:51 PM	Bypass solenoid MFC set to  0.000000
1/16/2013	12:00:51 PM	Tube furnace set to 0
1/16/2013	12:01:21 PM	Helium valve closed
1/16/2013	12:01:21 PM	H2 valve closed
1/16/2013	12:01:21 PM	BCl3 valve closed
1/16/2013	12:01:21 PM	PH3 valve closed
1/16/2013	12:01:21 PM	SiCl4 pre valve closed
1/16/2013	12:01:21 PM	SiCl4 post valve closed
1/16/2013	12:01:21 PM	Bypass valve closed
1/16/2013	12:01:21 PM	Bubbler valve closed
1/16/2013	12:01:21 PM	Main Vac valve opened
1/16/2013	12:01:21 PM	Helium MFC set to  0.000000
1/16/2013	12:01:21 PM	H2 MFC set to  0.000000
1/16/2013	12:01:21 PM	BCl3 MFC set to  0.000000
1/16/2013	12:01:21 PM	PH3 MFC set to  0.000000
1/16/2013	12:01:21 PM	SiCl4 MFC set to  0.000000
1/16/2013	12:01:21 PM	Bypass solenoid MFC set to  0.000000
1/16/2013	12:01:21 PM	Tube furnace set to 0
1/16/2013	12:01:51 PM	H2 valve closed
1/16/2013	12:01:51 PM	BCl3 valve closed
1/16/2013	12:01:51 PM	PH3 valve closed
1/16/2013	12:01:51 PM	SiCl4 pre valve closed
1/16/2013	12:01:51 PM	SiCl4 post valve closed
1/16/2013	12:01:51 PM	Bypass valve closed
1/16/2013	12:01:51 PM	Bubbler valve closed
1/16/2013	12:01:51 PM	Helium valve opened
1/16/2013	12:01:51 PM	Main Vac valve opened
1/16/2013	12:01:51 PM	Helium MFC set to  20.000000
1/16/2013	12:01:51 PM	H2 MFC set to  0.000000
1/16/2013	12:01:51 PM	BCl3 MFC set to  0.000000
1/16/2013	12:01:51 PM	PH3 MFC set to  0.000000
1/16/2013	12:01:51 PM	SiCl4 MFC set to  0.000000
1/16/2013	12:01:51 PM	Bypass solenoid MFC set to  0.000000
1/16/2013	12:01:51 PM	Tube furnace set to 0
1/16/2013	12:02:21 PM	Helium valve closed
1/16/2013	12:02:21 PM	H2 valve closed
1/16/2013	12:02:21 PM	BCl3 valve closed
1/16/2013	12:02:21 PM	PH3 valve closed
1/16/2013	12:02:21 PM	SiCl4 pre valve closed
1/16/2013	12:02:21 PM	SiCl4 post valve closed
1/16/2013	12:02:21 PM	Bypass valve closed
1/16/2013	12:02:21 PM	Bubbler valve closed
1/16/2013	12:02:21 PM	Main Vac valve opened
1/16/2013	12:02:21 PM	Helium MFC set to  0.000000
1/16/2013	12:02:21 PM	H2 MFC set to  0.000000
1/16/2013	12:02:21 PM	BCl3 MFC set to  0.000000
1/16/2013	12:02:21 PM	PH3 MFC set to  0.000000
1/16/2013	12:02:21 PM	SiCl4 MFC set to  0.000000
1/16/2013	12:02:21 PM	Bypass solenoid MFC set to  0.000000
1/16/2013	12:02:22 PM	Tube furnace set to 0
1/16/2013	12:02:52 PM	H2 valve closed
1/16/2013	12:02:52 PM	BCl3 valve closed
1/16/2013	12:02:52 PM	PH3 valve closed
1/16/2013	12:02:52 PM	SiCl4 pre valve closed
1/16/2013	12:02:52 PM	SiCl4 post valve closed
1/16/2013	12:02:52 PM	Bypass valve closed
1/16/2013	12:02:52 PM	Bubbler valve closed
1/16/2013	12:02:52 PM	Helium valve opened
1/16/2013	12:02:52 PM	Main Vac valve opened
1/16/2013	12:02:52 PM	Helium MFC set to  20.000000
1/16/2013	12:02:52 PM	H2 MFC set to  0.000000
1/16/2013	12:02:52 PM	BCl3 MFC set to  0.000000
1/16/2013	12:02:52 PM	PH3 MFC set to  0.000000
1/16/2013	12:02:52 PM	SiCl4 MFC set to  0.000000
1/16/2013	12:02:52 PM	Bypass solenoid MFC set to  0.000000
1/16/2013	12:02:52 PM	Tube furnace set to 0
1/16/2013	12:03:22 PM	Helium valve closed
1/16/2013	12:03:22 PM	H2 valve closed
1/16/2013	12:03:22 PM	BCl3 valve closed
1/16/2013	12:03:22 PM	PH3 valve closed
1/16/2013	12:03:22 PM	SiCl4 pre valve closed
1/16/2013	12:03:22 PM	SiCl4 post valve closed
1/16/2013	12:03:22 PM	Bypass valve closed
1/16/2013	12:03:22 PM	Bubbler valve closed
1/16/2013	12:03:22 PM	Main Vac valve opened
1/16/2013	12:03:22 PM	Helium MFC set to  0.000000
1/16/2013	12:03:22 PM	H2 MFC set to  0.000000
1/16/2013	12:03:22 PM	BCl3 MFC set to  0.000000
1/16/2013	12:03:22 PM	PH3 MFC set to  0.000000
1/16/2013	12:03:22 PM	SiCl4 MFC set to  0.000000
1/16/2013	12:03:22 PM	Bypass solenoid MFC set to  0.000000
1/16/2013	12:03:22 PM	Tube furnace set to 0
1/16/2013	12:03:52 PM	H2 valve closed
1/16/2013	12:03:52 PM	BCl3 valve closed
1/16/2013	12:03:52 PM	PH3 valve closed
1/16/2013	12:03:52 PM	SiCl4 pre valve closed
1/16/2013	12:03:52 PM	SiCl4 post valve closed
1/16/2013	12:03:52 PM	Bypass valve closed
1/16/2013	12:03:52 PM	Bubbler valve closed
1/16/2013	12:03:52 PM	Helium valve opened
1/16/2013	12:03:52 PM	Main Vac valve opened
1/16/2013	12:03:52 PM	Helium MFC set to  20.000000
1/16/2013	12:03:52 PM	H2 MFC set to  0.000000
1/16/2013	12:03:52 PM	BCl3 MFC set to  0.000000
1/16/2013	12:03:52 PM	PH3 MFC set to  0.000000
1/16/2013	12:03:52 PM	SiCl4 MFC set to  0.000000
1/16/2013	12:03:52 PM	Bypass solenoid MFC set to  0.000000
1/16/2013	12:03:52 PM	Tube furnace set to 0
1/16/2013	12:04:22 PM	Helium valve closed
1/16/2013	12:04:22 PM	H2 valve closed
1/16/2013	12:04:22 PM	BCl3 valve closed
1/16/2013	12:04:22 PM	PH3 valve closed
1/16/2013	12:04:22 PM	SiCl4 pre valve closed
1/16/2013	12:04:22 PM	SiCl4 post valve closed
1/16/2013	12:04:22 PM	Bypass valve closed
1/16/2013	12:04:22 PM	Bubbler valve closed
1/16/2013	12:04:22 PM	Main Vac valve opened
1/16/2013	12:04:22 PM	Helium MFC set to  0.000000
1/16/2013	12:04:22 PM	H2 MFC set to  0.000000
1/16/2013	12:04:22 PM	BCl3 MFC set to  0.000000
1/16/2013	12:04:22 PM	PH3 MFC set to  0.000000
1/16/2013	12:04:22 PM	SiCl4 MFC set to  0.000000
1/16/2013	12:04:22 PM	Bypass solenoid MFC set to  0.000000
1/16/2013	12:04:23 PM	Tube furnace set to 0
1/16/2013	12:04:24 PM	Run finished at 12:04 PM
1/16/2013	12:04:24 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
1/16/2013	12:51:06 PM	Recipe started at 12:51 PM
1/16/2013	12:51:06 PM	Helium valve closed
1/16/2013	12:51:06 PM	H2 valve closed
1/16/2013	12:51:06 PM	BCl3 valve closed
1/16/2013	12:51:06 PM	PH3 valve closed
1/16/2013	12:51:06 PM	SiCl4 pre valve closed
1/16/2013	12:51:06 PM	SiCl4 post valve closed
1/16/2013	12:51:06 PM	Main Vac valve closed
1/16/2013	12:51:06 PM	Bypass valve closed
1/16/2013	12:51:06 PM	Bubbler valve closed
1/16/2013	12:51:06 PM	Helium MFC set to  0.000000
1/16/2013	12:51:06 PM	H2 MFC set to  0.000000
1/16/2013	12:51:06 PM	BCl3 MFC set to  0.000000
1/16/2013	12:51:06 PM	PH3 MFC set to  0.000000
1/16/2013	12:51:06 PM	SiCl4 MFC set to  0.000000
1/16/2013	12:51:06 PM	Bypass solenoid MFC set to  0.000000
1/16/2013	12:51:06 PM	Tube furnace set to 0
1/16/2013	12:51:09 PM	Helium valve closed
1/16/2013	12:51:09 PM	BCl3 valve closed
1/16/2013	12:51:09 PM	PH3 valve closed
1/16/2013	12:51:09 PM	SiCl4 pre valve closed
1/16/2013	12:51:09 PM	SiCl4 post valve closed
1/16/2013	12:51:09 PM	Main Vac valve closed
1/16/2013	12:51:09 PM	Bypass valve closed
1/16/2013	12:51:09 PM	Bubbler valve closed
1/16/2013	12:51:09 PM	H2 valve opened
1/16/2013	12:51:09 PM	Helium MFC set to  0.000000
1/16/2013	12:51:09 PM	H2 MFC set to  500.000000
1/16/2013	12:51:09 PM	BCl3 MFC set to  0.000000
1/16/2013	12:51:09 PM	PH3 MFC set to  0.000000
1/16/2013	12:51:09 PM	SiCl4 MFC set to  0.000000
1/16/2013	12:51:09 PM	Bypass solenoid MFC set to  0.000000
1/16/2013	12:51:10 PM	Tube furnace set to 0
1/16/2013	12:52:26 PM	Helium valve closed
1/16/2013	12:52:26 PM	BCl3 valve closed
1/16/2013	12:52:26 PM	PH3 valve closed
1/16/2013	12:52:26 PM	SiCl4 pre valve closed
1/16/2013	12:52:26 PM	SiCl4 post valve closed
1/16/2013	12:52:26 PM	Main Vac valve closed
1/16/2013	12:52:26 PM	Bypass valve closed
1/16/2013	12:52:26 PM	H2 valve opened
1/16/2013	12:52:26 PM	Bubbler valve opened
1/16/2013	12:52:26 PM	Helium MFC set to  0.000000
1/16/2013	12:52:26 PM	H2 MFC set to  500.000000
1/16/2013	12:52:26 PM	BCl3 MFC set to  0.000000
1/16/2013	12:52:26 PM	PH3 MFC set to  0.000000
1/16/2013	12:52:26 PM	SiCl4 MFC set to  0.000000
1/16/2013	12:52:26 PM	Bypass solenoid MFC set to  0.000000
1/16/2013	12:52:26 PM	Tube furnace set to 0
1/16/2013	12:52:27 PM	Helium valve closed
1/16/2013	12:52:27 PM	BCl3 valve closed
1/16/2013	12:52:27 PM	PH3 valve closed
1/16/2013	12:52:27 PM	SiCl4 pre valve closed
1/16/2013	12:52:27 PM	SiCl4 post valve closed
1/16/2013	12:52:27 PM	Main Vac valve closed
1/16/2013	12:52:27 PM	Bypass valve closed
1/16/2013	12:52:27 PM	H2 valve opened
1/16/2013	12:52:27 PM	Bubbler valve opened
1/16/2013	12:52:27 PM	Helium MFC set to  0.000000
1/16/2013	12:52:27 PM	H2 MFC set to  500.000000
1/16/2013	12:52:27 PM	BCl3 MFC set to  0.000000
1/16/2013	12:52:27 PM	PH3 MFC set to  0.000000
1/16/2013	12:52:27 PM	SiCl4 MFC set to  0.000000
1/16/2013	12:52:27 PM	Bypass solenoid MFC set to  0.000000
1/16/2013	12:52:27 PM	Tube furnace set to 1000
1/16/2013	1:12:27 PM	Helium valve closed
1/16/2013	1:12:27 PM	PH3 valve closed
1/16/2013	1:12:27 PM	Main Vac valve closed
1/16/2013	1:12:27 PM	Bypass valve closed
1/16/2013	1:12:27 PM	H2 valve opened
1/16/2013	1:12:27 PM	BCl3 valve opened
1/16/2013	1:12:27 PM	SiCl4 pre valve opened
1/16/2013	1:12:27 PM	SiCl4 post valve opened
1/16/2013	1:12:27 PM	Bubbler valve opened
1/16/2013	1:12:27 PM	Helium MFC set to  0.000000
1/16/2013	1:12:27 PM	H2 MFC set to  450.000000
1/16/2013	1:12:27 PM	BCl3 MFC set to  1.300000
1/16/2013	1:12:27 PM	PH3 MFC set to  0.000000
1/16/2013	1:12:27 PM	SiCl4 MFC set to  50.000000
1/16/2013	1:12:27 PM	Bypass solenoid MFC set to  0.000000
1/16/2013	1:12:27 PM	Tube furnace set to 1000
1/16/2013	1:26:27 PM	Helium valve closed
1/16/2013	1:26:27 PM	BCl3 valve closed
1/16/2013	1:26:27 PM	PH3 valve closed
1/16/2013	1:26:27 PM	SiCl4 pre valve closed
1/16/2013	1:26:27 PM	SiCl4 post valve closed
1/16/2013	1:26:27 PM	Main Vac valve closed
1/16/2013	1:26:27 PM	Bypass valve closed
1/16/2013	1:26:27 PM	H2 valve opened
1/16/2013	1:26:28 PM	Bubbler valve opened
1/16/2013	1:26:28 PM	Helium MFC set to  0.000000
1/16/2013	1:26:28 PM	H2 MFC set to  500.000000
1/16/2013	1:26:28 PM	BCl3 MFC set to  0.000000
1/16/2013	1:26:28 PM	PH3 MFC set to  0.000000
1/16/2013	1:26:28 PM	SiCl4 MFC set to  0.000000
1/16/2013	1:26:28 PM	Bypass solenoid MFC set to  0.000000
1/16/2013	1:26:28 PM	Tube furnace set to 750
1/16/2013	1:31:28 PM	H2 valve closed
1/16/2013	1:31:28 PM	BCl3 valve closed
1/16/2013	1:31:28 PM	PH3 valve closed
1/16/2013	1:31:28 PM	SiCl4 pre valve closed
1/16/2013	1:31:28 PM	SiCl4 post valve closed
1/16/2013	1:31:28 PM	Main Vac valve closed
1/16/2013	1:31:28 PM	Bypass valve closed
1/16/2013	1:31:28 PM	Helium valve opened
1/16/2013	1:31:28 PM	Bubbler valve opened
1/16/2013	1:31:28 PM	Helium MFC set to  500.000000
1/16/2013	1:31:28 PM	H2 MFC set to  0.000000
1/16/2013	1:31:28 PM	BCl3 MFC set to  0.000000
1/16/2013	1:31:28 PM	PH3 MFC set to  0.000000
1/16/2013	1:31:28 PM	SiCl4 MFC set to  0.000000
1/16/2013	1:31:28 PM	Bypass solenoid MFC set to  0.000000
1/16/2013	1:31:28 PM	Tube furnace set to 0
1/16/2013	1:51:28 PM	Helium valve closed
1/16/2013	1:51:28 PM	H2 valve closed
1/16/2013	1:51:28 PM	BCl3 valve closed
1/16/2013	1:51:28 PM	PH3 valve closed
1/16/2013	1:51:28 PM	SiCl4 pre valve closed
1/16/2013	1:51:28 PM	SiCl4 post valve closed
1/16/2013	1:51:28 PM	Main Vac valve closed
1/16/2013	1:51:28 PM	Bypass valve closed
1/16/2013	1:51:28 PM	Bubbler valve closed
1/16/2013	1:51:28 PM	Helium MFC set to  0.000000
1/16/2013	1:51:28 PM	H2 MFC set to  0.000000
1/16/2013	1:51:28 PM	BCl3 MFC set to  0.000000
1/16/2013	1:51:28 PM	PH3 MFC set to  0.000000
1/16/2013	1:51:28 PM	SiCl4 MFC set to  0.000000
1/16/2013	1:51:28 PM	Bypass solenoid MFC set to  0.000000
1/16/2013	1:51:28 PM	Tube furnace set to 0
1/16/2013	1:51:29 PM	Run finished at 1:51 PM
1/16/2013	1:54:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/16/2013	1:54:40 PM	Recipe started at 1:54 PM
1/16/2013	1:54:40 PM	Helium valve closed
1/16/2013	1:54:40 PM	H2 valve closed
1/16/2013	1:54:40 PM	BCl3 valve closed
1/16/2013	1:54:40 PM	PH3 valve closed
1/16/2013	1:54:40 PM	SiCl4 pre valve closed
1/16/2013	1:54:40 PM	SiCl4 post valve closed
1/16/2013	1:54:40 PM	Main Vac valve closed
1/16/2013	1:54:40 PM	Bubbler valve closed
1/16/2013	1:54:40 PM	Bypass valve opened
1/16/2013	1:54:40 PM	Helium MFC set to  0.000000
1/16/2013	1:54:40 PM	H2 MFC set to  0.000000
1/16/2013	1:54:40 PM	BCl3 MFC set to  0.000000
1/16/2013	1:54:40 PM	PH3 MFC set to  0.000000
1/16/2013	1:54:40 PM	SiCl4 MFC set to  0.000000
1/16/2013	1:54:40 PM	Bypass solenoid MFC set to  0.000000
1/16/2013	1:54:40 PM	Tube furnace set to 0
1/16/2013	1:55:56 PM	Helium valve closed
1/16/2013	1:55:56 PM	H2 valve closed
1/16/2013	1:55:56 PM	BCl3 valve closed
1/16/2013	1:55:56 PM	PH3 valve closed
1/16/2013	1:55:56 PM	SiCl4 pre valve closed
1/16/2013	1:55:56 PM	SiCl4 post valve closed
1/16/2013	1:55:56 PM	Main Vac valve closed
1/16/2013	1:55:56 PM	Bubbler valve closed
1/16/2013	1:55:56 PM	Bypass valve opened
1/16/2013	1:55:56 PM	Helium MFC set to  0.000000
1/16/2013	1:55:56 PM	H2 MFC set to  0.000000
1/16/2013	1:55:56 PM	BCl3 MFC set to  0.000000
1/16/2013	1:55:56 PM	PH3 MFC set to  0.000000
1/16/2013	1:55:56 PM	SiCl4 MFC set to  0.000000
1/16/2013	1:55:56 PM	Bypass solenoid MFC set to  0.000000
1/16/2013	1:55:56 PM	Tube furnace set to 0
1/16/2013	1:56:12 PM	Helium valve closed
1/16/2013	1:56:12 PM	H2 valve closed
1/16/2013	1:56:12 PM	BCl3 valve closed
1/16/2013	1:56:12 PM	PH3 valve closed
1/16/2013	1:56:12 PM	SiCl4 pre valve closed
1/16/2013	1:56:12 PM	SiCl4 post valve closed
1/16/2013	1:56:12 PM	Bypass valve closed
1/16/2013	1:56:12 PM	Bubbler valve closed
1/16/2013	1:56:12 PM	Main Vac valve opened
1/16/2013	1:56:12 PM	Helium MFC set to  0.000000
1/16/2013	1:56:12 PM	H2 MFC set to  0.000000
1/16/2013	1:56:12 PM	BCl3 MFC set to  0.000000
1/16/2013	1:56:12 PM	PH3 MFC set to  0.000000
1/16/2013	1:56:12 PM	SiCl4 MFC set to  0.000000
1/16/2013	1:56:12 PM	Bypass solenoid MFC set to  0.000000
1/16/2013	1:56:12 PM	Tube furnace set to 0
1/16/2013	1:56:13 PM	Run finished at 1:56 PM
1/16/2013	1:56:13 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/16/2013	2:23:24 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
1/16/2013	2:23:31 PM	Recipe started at 2:23 PM
1/16/2013	2:23:31 PM	Helium valve closed
1/16/2013	2:23:31 PM	H2 valve closed
1/16/2013	2:23:31 PM	BCl3 valve closed
1/16/2013	2:23:31 PM	PH3 valve closed
1/16/2013	2:23:31 PM	SiCl4 pre valve closed
1/16/2013	2:23:31 PM	SiCl4 post valve closed
1/16/2013	2:23:31 PM	Main Vac valve closed
1/16/2013	2:23:31 PM	Bubbler valve closed
1/16/2013	2:23:31 PM	Bypass valve opened
1/16/2013	2:23:31 PM	Helium MFC set to  0.000000
1/16/2013	2:23:31 PM	H2 MFC set to  0.000000
1/16/2013	2:23:31 PM	BCl3 MFC set to  0.000000
1/16/2013	2:23:31 PM	PH3 MFC set to  0.000000
1/16/2013	2:23:31 PM	SiCl4 MFC set to  0.000000
1/16/2013	2:23:31 PM	Bypass solenoid MFC set to  0.000000
1/16/2013	2:23:31 PM	Tube furnace set to 0
1/16/2013	2:23:31 PM	Helium valve closed
1/16/2013	2:23:31 PM	H2 valve closed
1/16/2013	2:23:31 PM	BCl3 valve closed
1/16/2013	2:23:31 PM	PH3 valve closed
1/16/2013	2:23:31 PM	SiCl4 pre valve closed
1/16/2013	2:23:31 PM	SiCl4 post valve closed
1/16/2013	2:23:31 PM	Main Vac valve closed
1/16/2013	2:23:31 PM	Bubbler valve closed
1/16/2013	2:23:31 PM	Bypass valve opened
1/16/2013	2:23:31 PM	Helium MFC set to  0.000000
1/16/2013	2:23:31 PM	H2 MFC set to  0.000000
1/16/2013	2:23:31 PM	BCl3 MFC set to  0.000000
1/16/2013	2:23:31 PM	PH3 MFC set to  0.000000
1/16/2013	2:23:31 PM	SiCl4 MFC set to  0.000000
1/16/2013	2:23:31 PM	Bypass solenoid MFC set to  0.000000
1/16/2013	2:23:32 PM	Tube furnace set to 0
1/16/2013	2:23:33 PM	Helium valve closed
1/16/2013	2:23:33 PM	H2 valve closed
1/16/2013	2:23:33 PM	BCl3 valve closed
1/16/2013	2:23:33 PM	PH3 valve closed
1/16/2013	2:23:33 PM	SiCl4 pre valve closed
1/16/2013	2:23:33 PM	SiCl4 post valve closed
1/16/2013	2:23:33 PM	Bypass valve closed
1/16/2013	2:23:33 PM	Bubbler valve closed
1/16/2013	2:23:33 PM	Main Vac valve opened
1/16/2013	2:23:33 PM	Helium MFC set to  0.000000
1/16/2013	2:23:33 PM	H2 MFC set to  0.000000
1/16/2013	2:23:33 PM	BCl3 MFC set to  0.000000
1/16/2013	2:23:33 PM	PH3 MFC set to  0.000000
1/16/2013	2:23:33 PM	SiCl4 MFC set to  0.000000
1/16/2013	2:23:33 PM	Bypass solenoid MFC set to  0.000000
1/16/2013	2:23:33 PM	Tube furnace set to 0
1/16/2013	2:23:34 PM	H2 valve closed
1/16/2013	2:23:34 PM	BCl3 valve closed
1/16/2013	2:23:34 PM	PH3 valve closed
1/16/2013	2:23:34 PM	SiCl4 pre valve closed
1/16/2013	2:23:34 PM	SiCl4 post valve closed
1/16/2013	2:23:34 PM	Bypass valve closed
1/16/2013	2:23:34 PM	Bubbler valve closed
1/16/2013	2:23:34 PM	Helium valve opened
1/16/2013	2:23:34 PM	Main Vac valve opened
1/16/2013	2:23:34 PM	Helium MFC set to  20.000000
1/16/2013	2:23:34 PM	H2 MFC set to  0.000000
1/16/2013	2:23:34 PM	BCl3 MFC set to  0.000000
1/16/2013	2:23:34 PM	PH3 MFC set to  0.000000
1/16/2013	2:23:34 PM	SiCl4 MFC set to  0.000000
1/16/2013	2:23:34 PM	Bypass solenoid MFC set to  0.000000
1/16/2013	2:23:34 PM	Tube furnace set to 0
1/16/2013	2:24:04 PM	Helium valve closed
1/16/2013	2:24:04 PM	H2 valve closed
1/16/2013	2:24:04 PM	BCl3 valve closed
1/16/2013	2:24:04 PM	PH3 valve closed
1/16/2013	2:24:04 PM	SiCl4 pre valve closed
1/16/2013	2:24:04 PM	SiCl4 post valve closed
1/16/2013	2:24:04 PM	Bypass valve closed
1/16/2013	2:24:04 PM	Bubbler valve closed
1/16/2013	2:24:04 PM	Main Vac valve opened
1/16/2013	2:24:04 PM	Helium MFC set to  0.000000
1/16/2013	2:24:04 PM	H2 MFC set to  0.000000
1/16/2013	2:24:04 PM	BCl3 MFC set to  0.000000
1/16/2013	2:24:04 PM	PH3 MFC set to  0.000000
1/16/2013	2:24:04 PM	SiCl4 MFC set to  0.000000
1/16/2013	2:24:04 PM	Bypass solenoid MFC set to  0.000000
1/16/2013	2:24:04 PM	Tube furnace set to 0
1/16/2013	2:24:34 PM	H2 valve closed
1/16/2013	2:24:34 PM	BCl3 valve closed
1/16/2013	2:24:34 PM	PH3 valve closed
1/16/2013	2:24:34 PM	SiCl4 pre valve closed
1/16/2013	2:24:34 PM	SiCl4 post valve closed
1/16/2013	2:24:34 PM	Bypass valve closed
1/16/2013	2:24:34 PM	Bubbler valve closed
1/16/2013	2:24:34 PM	Helium valve opened
1/16/2013	2:24:34 PM	Main Vac valve opened
1/16/2013	2:24:34 PM	Helium MFC set to  20.000000
1/16/2013	2:24:34 PM	H2 MFC set to  0.000000
1/16/2013	2:24:34 PM	BCl3 MFC set to  0.000000
1/16/2013	2:24:34 PM	PH3 MFC set to  0.000000
1/16/2013	2:24:34 PM	SiCl4 MFC set to  0.000000
1/16/2013	2:24:34 PM	Bypass solenoid MFC set to  0.000000
1/16/2013	2:24:35 PM	Tube furnace set to 0
1/16/2013	2:25:05 PM	Helium valve closed
1/16/2013	2:25:05 PM	H2 valve closed
1/16/2013	2:25:05 PM	BCl3 valve closed
1/16/2013	2:25:05 PM	PH3 valve closed
1/16/2013	2:25:05 PM	SiCl4 pre valve closed
1/16/2013	2:25:05 PM	SiCl4 post valve closed
1/16/2013	2:25:05 PM	Bypass valve closed
1/16/2013	2:25:05 PM	Bubbler valve closed
1/16/2013	2:25:05 PM	Main Vac valve opened
1/16/2013	2:25:05 PM	Helium MFC set to  0.000000
1/16/2013	2:25:05 PM	H2 MFC set to  0.000000
1/16/2013	2:25:05 PM	BCl3 MFC set to  0.000000
1/16/2013	2:25:05 PM	PH3 MFC set to  0.000000
1/16/2013	2:25:05 PM	SiCl4 MFC set to  0.000000
1/16/2013	2:25:05 PM	Bypass solenoid MFC set to  0.000000
1/16/2013	2:25:05 PM	Tube furnace set to 0
1/16/2013	2:25:35 PM	H2 valve closed
1/16/2013	2:25:35 PM	BCl3 valve closed
1/16/2013	2:25:35 PM	PH3 valve closed
1/16/2013	2:25:35 PM	SiCl4 pre valve closed
1/16/2013	2:25:35 PM	SiCl4 post valve closed
1/16/2013	2:25:35 PM	Bypass valve closed
1/16/2013	2:25:35 PM	Bubbler valve closed
1/16/2013	2:25:35 PM	Helium valve opened
1/16/2013	2:25:35 PM	Main Vac valve opened
1/16/2013	2:25:35 PM	Helium MFC set to  20.000000
1/16/2013	2:25:35 PM	H2 MFC set to  0.000000
1/16/2013	2:25:35 PM	BCl3 MFC set to  0.000000
1/16/2013	2:25:35 PM	PH3 MFC set to  0.000000
1/16/2013	2:25:35 PM	SiCl4 MFC set to  0.000000
1/16/2013	2:25:35 PM	Bypass solenoid MFC set to  0.000000
1/16/2013	2:25:35 PM	Tube furnace set to 0
1/16/2013	2:26:05 PM	Helium valve closed
1/16/2013	2:26:05 PM	H2 valve closed
1/16/2013	2:26:05 PM	BCl3 valve closed
1/16/2013	2:26:05 PM	PH3 valve closed
1/16/2013	2:26:05 PM	SiCl4 pre valve closed
1/16/2013	2:26:05 PM	SiCl4 post valve closed
1/16/2013	2:26:05 PM	Bypass valve closed
1/16/2013	2:26:05 PM	Bubbler valve closed
1/16/2013	2:26:05 PM	Main Vac valve opened
1/16/2013	2:26:05 PM	Helium MFC set to  0.000000
1/16/2013	2:26:05 PM	H2 MFC set to  0.000000
1/16/2013	2:26:05 PM	BCl3 MFC set to  0.000000
1/16/2013	2:26:05 PM	PH3 MFC set to  0.000000
1/16/2013	2:26:05 PM	SiCl4 MFC set to  0.000000
1/16/2013	2:26:05 PM	Bypass solenoid MFC set to  0.000000
1/16/2013	2:26:05 PM	Tube furnace set to 0
1/16/2013	2:26:35 PM	H2 valve closed
1/16/2013	2:26:35 PM	BCl3 valve closed
1/16/2013	2:26:35 PM	PH3 valve closed
1/16/2013	2:26:35 PM	SiCl4 pre valve closed
1/16/2013	2:26:35 PM	SiCl4 post valve closed
1/16/2013	2:26:35 PM	Bypass valve closed
1/16/2013	2:26:35 PM	Bubbler valve closed
1/16/2013	2:26:35 PM	Helium valve opened
1/16/2013	2:26:35 PM	Main Vac valve opened
1/16/2013	2:26:35 PM	Helium MFC set to  20.000000
1/16/2013	2:26:35 PM	H2 MFC set to  0.000000
1/16/2013	2:26:35 PM	BCl3 MFC set to  0.000000
1/16/2013	2:26:35 PM	PH3 MFC set to  0.000000
1/16/2013	2:26:35 PM	SiCl4 MFC set to  0.000000
1/16/2013	2:26:35 PM	Bypass solenoid MFC set to  0.000000
1/16/2013	2:26:36 PM	Tube furnace set to 0
1/16/2013	2:27:06 PM	Helium valve closed
1/16/2013	2:27:06 PM	H2 valve closed
1/16/2013	2:27:06 PM	BCl3 valve closed
1/16/2013	2:27:06 PM	PH3 valve closed
1/16/2013	2:27:06 PM	SiCl4 pre valve closed
1/16/2013	2:27:06 PM	SiCl4 post valve closed
1/16/2013	2:27:06 PM	Bypass valve closed
1/16/2013	2:27:06 PM	Bubbler valve closed
1/16/2013	2:27:06 PM	Main Vac valve opened
1/16/2013	2:27:06 PM	Helium MFC set to  0.000000
1/16/2013	2:27:06 PM	H2 MFC set to  0.000000
1/16/2013	2:27:06 PM	BCl3 MFC set to  0.000000
1/16/2013	2:27:06 PM	PH3 MFC set to  0.000000
1/16/2013	2:27:06 PM	SiCl4 MFC set to  0.000000
1/16/2013	2:27:06 PM	Bypass solenoid MFC set to  0.000000
1/16/2013	2:27:06 PM	Tube furnace set to 0
1/16/2013	2:27:36 PM	H2 valve closed
1/16/2013	2:27:36 PM	BCl3 valve closed
1/16/2013	2:27:36 PM	PH3 valve closed
1/16/2013	2:27:36 PM	SiCl4 pre valve closed
1/16/2013	2:27:36 PM	SiCl4 post valve closed
1/16/2013	2:27:36 PM	Bypass valve closed
1/16/2013	2:27:36 PM	Bubbler valve closed
1/16/2013	2:27:36 PM	Helium valve opened
1/16/2013	2:27:36 PM	Main Vac valve opened
1/16/2013	2:27:36 PM	Helium MFC set to  20.000000
1/16/2013	2:27:36 PM	H2 MFC set to  0.000000
1/16/2013	2:27:36 PM	BCl3 MFC set to  0.000000
1/16/2013	2:27:36 PM	PH3 MFC set to  0.000000
1/16/2013	2:27:36 PM	SiCl4 MFC set to  0.000000
1/16/2013	2:27:36 PM	Bypass solenoid MFC set to  0.000000
1/16/2013	2:27:36 PM	Tube furnace set to 0
1/16/2013	2:28:06 PM	Helium valve closed
1/16/2013	2:28:06 PM	H2 valve closed
1/16/2013	2:28:06 PM	BCl3 valve closed
1/16/2013	2:28:06 PM	PH3 valve closed
1/16/2013	2:28:06 PM	SiCl4 pre valve closed
1/16/2013	2:28:06 PM	SiCl4 post valve closed
1/16/2013	2:28:06 PM	Bypass valve closed
1/16/2013	2:28:06 PM	Bubbler valve closed
1/16/2013	2:28:06 PM	Main Vac valve opened
1/16/2013	2:28:06 PM	Helium MFC set to  0.000000
1/16/2013	2:28:06 PM	H2 MFC set to  0.000000
1/16/2013	2:28:06 PM	BCl3 MFC set to  0.000000
1/16/2013	2:28:06 PM	PH3 MFC set to  0.000000
1/16/2013	2:28:06 PM	SiCl4 MFC set to  0.000000
1/16/2013	2:28:06 PM	Bypass solenoid MFC set to  0.000000
1/16/2013	2:28:06 PM	Tube furnace set to 0
1/16/2013	2:28:36 PM	H2 valve closed
1/16/2013	2:28:36 PM	BCl3 valve closed
1/16/2013	2:28:36 PM	PH3 valve closed
1/16/2013	2:28:36 PM	SiCl4 pre valve closed
1/16/2013	2:28:36 PM	SiCl4 post valve closed
1/16/2013	2:28:36 PM	Bypass valve closed
1/16/2013	2:28:36 PM	Bubbler valve closed
1/16/2013	2:28:36 PM	Helium valve opened
1/16/2013	2:28:36 PM	Main Vac valve opened
1/16/2013	2:28:36 PM	Helium MFC set to  20.000000
1/16/2013	2:28:36 PM	H2 MFC set to  0.000000
1/16/2013	2:28:36 PM	BCl3 MFC set to  0.000000
1/16/2013	2:28:36 PM	PH3 MFC set to  0.000000
1/16/2013	2:28:36 PM	SiCl4 MFC set to  0.000000
1/16/2013	2:28:36 PM	Bypass solenoid MFC set to  0.000000
1/16/2013	2:28:37 PM	Tube furnace set to 0
1/16/2013	2:29:07 PM	Helium valve closed
1/16/2013	2:29:07 PM	H2 valve closed
1/16/2013	2:29:07 PM	BCl3 valve closed
1/16/2013	2:29:07 PM	PH3 valve closed
1/16/2013	2:29:07 PM	SiCl4 pre valve closed
1/16/2013	2:29:07 PM	SiCl4 post valve closed
1/16/2013	2:29:07 PM	Bypass valve closed
1/16/2013	2:29:07 PM	Bubbler valve closed
1/16/2013	2:29:07 PM	Main Vac valve opened
1/16/2013	2:29:07 PM	Helium MFC set to  0.000000
1/16/2013	2:29:07 PM	H2 MFC set to  0.000000
1/16/2013	2:29:07 PM	BCl3 MFC set to  0.000000
1/16/2013	2:29:07 PM	PH3 MFC set to  0.000000
1/16/2013	2:29:07 PM	SiCl4 MFC set to  0.000000
1/16/2013	2:29:07 PM	Bypass solenoid MFC set to  0.000000
1/16/2013	2:29:07 PM	Tube furnace set to 0
1/16/2013	2:29:37 PM	H2 valve closed
1/16/2013	2:29:37 PM	BCl3 valve closed
1/16/2013	2:29:37 PM	PH3 valve closed
1/16/2013	2:29:37 PM	SiCl4 pre valve closed
1/16/2013	2:29:37 PM	SiCl4 post valve closed
1/16/2013	2:29:37 PM	Bypass valve closed
1/16/2013	2:29:37 PM	Bubbler valve closed
1/16/2013	2:29:37 PM	Helium valve opened
1/16/2013	2:29:37 PM	Main Vac valve opened
1/16/2013	2:29:37 PM	Helium MFC set to  20.000000
1/16/2013	2:29:37 PM	H2 MFC set to  0.000000
1/16/2013	2:29:37 PM	BCl3 MFC set to  0.000000
1/16/2013	2:29:37 PM	PH3 MFC set to  0.000000
1/16/2013	2:29:37 PM	SiCl4 MFC set to  0.000000
1/16/2013	2:29:37 PM	Bypass solenoid MFC set to  0.000000
1/16/2013	2:29:37 PM	Tube furnace set to 0
1/16/2013	2:30:07 PM	Helium valve closed
1/16/2013	2:30:07 PM	H2 valve closed
1/16/2013	2:30:07 PM	BCl3 valve closed
1/16/2013	2:30:07 PM	PH3 valve closed
1/16/2013	2:30:07 PM	SiCl4 pre valve closed
1/16/2013	2:30:07 PM	SiCl4 post valve closed
1/16/2013	2:30:07 PM	Bypass valve closed
1/16/2013	2:30:07 PM	Bubbler valve closed
1/16/2013	2:30:07 PM	Main Vac valve opened
1/16/2013	2:30:07 PM	Helium MFC set to  0.000000
1/16/2013	2:30:07 PM	H2 MFC set to  0.000000
1/16/2013	2:30:07 PM	BCl3 MFC set to  0.000000
1/16/2013	2:30:07 PM	PH3 MFC set to  0.000000
1/16/2013	2:30:07 PM	SiCl4 MFC set to  0.000000
1/16/2013	2:30:07 PM	Bypass solenoid MFC set to  0.000000
1/16/2013	2:30:07 PM	Tube furnace set to 0
1/16/2013	2:30:37 PM	H2 valve closed
1/16/2013	2:30:37 PM	BCl3 valve closed
1/16/2013	2:30:37 PM	PH3 valve closed
1/16/2013	2:30:37 PM	SiCl4 pre valve closed
1/16/2013	2:30:37 PM	SiCl4 post valve closed
1/16/2013	2:30:37 PM	Bypass valve closed
1/16/2013	2:30:37 PM	Bubbler valve closed
1/16/2013	2:30:37 PM	Helium valve opened
1/16/2013	2:30:37 PM	Main Vac valve opened
1/16/2013	2:30:37 PM	Helium MFC set to  20.000000
1/16/2013	2:30:37 PM	H2 MFC set to  0.000000
1/16/2013	2:30:37 PM	BCl3 MFC set to  0.000000
1/16/2013	2:30:37 PM	PH3 MFC set to  0.000000
1/16/2013	2:30:37 PM	SiCl4 MFC set to  0.000000
1/16/2013	2:30:37 PM	Bypass solenoid MFC set to  0.000000
1/16/2013	2:30:38 PM	Tube furnace set to 0
1/16/2013	2:31:08 PM	Helium valve closed
1/16/2013	2:31:08 PM	H2 valve closed
1/16/2013	2:31:08 PM	BCl3 valve closed
1/16/2013	2:31:08 PM	PH3 valve closed
1/16/2013	2:31:08 PM	SiCl4 pre valve closed
1/16/2013	2:31:08 PM	SiCl4 post valve closed
1/16/2013	2:31:08 PM	Bypass valve closed
1/16/2013	2:31:08 PM	Bubbler valve closed
1/16/2013	2:31:08 PM	Main Vac valve opened
1/16/2013	2:31:08 PM	Helium MFC set to  0.000000
1/16/2013	2:31:08 PM	H2 MFC set to  0.000000
1/16/2013	2:31:08 PM	BCl3 MFC set to  0.000000
1/16/2013	2:31:08 PM	PH3 MFC set to  0.000000
1/16/2013	2:31:08 PM	SiCl4 MFC set to  0.000000
1/16/2013	2:31:08 PM	Bypass solenoid MFC set to  0.000000
1/16/2013	2:31:08 PM	Tube furnace set to 0
1/16/2013	2:31:38 PM	H2 valve closed
1/16/2013	2:31:38 PM	BCl3 valve closed
1/16/2013	2:31:38 PM	PH3 valve closed
1/16/2013	2:31:38 PM	SiCl4 pre valve closed
1/16/2013	2:31:38 PM	SiCl4 post valve closed
1/16/2013	2:31:38 PM	Bypass valve closed
1/16/2013	2:31:38 PM	Bubbler valve closed
1/16/2013	2:31:38 PM	Helium valve opened
1/16/2013	2:31:38 PM	Main Vac valve opened
1/16/2013	2:31:38 PM	Helium MFC set to  20.000000
1/16/2013	2:31:38 PM	H2 MFC set to  0.000000
1/16/2013	2:31:38 PM	BCl3 MFC set to  0.000000
1/16/2013	2:31:38 PM	PH3 MFC set to  0.000000
1/16/2013	2:31:38 PM	SiCl4 MFC set to  0.000000
1/16/2013	2:31:38 PM	Bypass solenoid MFC set to  0.000000
1/16/2013	2:31:38 PM	Tube furnace set to 0
1/16/2013	2:32:08 PM	Helium valve closed
1/16/2013	2:32:08 PM	H2 valve closed
1/16/2013	2:32:08 PM	BCl3 valve closed
1/16/2013	2:32:08 PM	PH3 valve closed
1/16/2013	2:32:08 PM	SiCl4 pre valve closed
1/16/2013	2:32:08 PM	SiCl4 post valve closed
1/16/2013	2:32:08 PM	Bypass valve closed
1/16/2013	2:32:08 PM	Bubbler valve closed
1/16/2013	2:32:08 PM	Main Vac valve opened
1/16/2013	2:32:08 PM	Helium MFC set to  0.000000
1/16/2013	2:32:08 PM	H2 MFC set to  0.000000
1/16/2013	2:32:08 PM	BCl3 MFC set to  0.000000
1/16/2013	2:32:08 PM	PH3 MFC set to  0.000000
1/16/2013	2:32:08 PM	SiCl4 MFC set to  0.000000
1/16/2013	2:32:08 PM	Bypass solenoid MFC set to  0.000000
1/16/2013	2:32:08 PM	Tube furnace set to 0
1/16/2013	2:32:38 PM	H2 valve closed
1/16/2013	2:32:38 PM	BCl3 valve closed
1/16/2013	2:32:38 PM	PH3 valve closed
1/16/2013	2:32:38 PM	SiCl4 pre valve closed
1/16/2013	2:32:38 PM	SiCl4 post valve closed
1/16/2013	2:32:38 PM	Bypass valve closed
1/16/2013	2:32:38 PM	Bubbler valve closed
1/16/2013	2:32:38 PM	Helium valve opened
1/16/2013	2:32:38 PM	Main Vac valve opened
1/16/2013	2:32:38 PM	Helium MFC set to  20.000000
1/16/2013	2:32:38 PM	H2 MFC set to  0.000000
1/16/2013	2:32:38 PM	BCl3 MFC set to  0.000000
1/16/2013	2:32:38 PM	PH3 MFC set to  0.000000
1/16/2013	2:32:38 PM	SiCl4 MFC set to  0.000000
1/16/2013	2:32:38 PM	Bypass solenoid MFC set to  0.000000
1/16/2013	2:32:39 PM	Tube furnace set to 0
1/16/2013	2:33:09 PM	Helium valve closed
1/16/2013	2:33:09 PM	H2 valve closed
1/16/2013	2:33:09 PM	BCl3 valve closed
1/16/2013	2:33:09 PM	PH3 valve closed
1/16/2013	2:33:09 PM	SiCl4 pre valve closed
1/16/2013	2:33:09 PM	SiCl4 post valve closed
1/16/2013	2:33:09 PM	Bypass valve closed
1/16/2013	2:33:09 PM	Bubbler valve closed
1/16/2013	2:33:09 PM	Main Vac valve opened
1/16/2013	2:33:09 PM	Helium MFC set to  0.000000
1/16/2013	2:33:09 PM	H2 MFC set to  0.000000
1/16/2013	2:33:09 PM	BCl3 MFC set to  0.000000
1/16/2013	2:33:09 PM	PH3 MFC set to  0.000000
1/16/2013	2:33:09 PM	SiCl4 MFC set to  0.000000
1/16/2013	2:33:09 PM	Bypass solenoid MFC set to  0.000000
1/16/2013	2:33:09 PM	Tube furnace set to 0
1/16/2013	2:33:10 PM	Run finished at 2:33 PM
1/16/2013	2:33:10 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
1/16/2013	2:34:41 PM	Recipe started at 2:34 PM
1/16/2013	2:34:41 PM	Helium valve closed
1/16/2013	2:34:41 PM	H2 valve closed
1/16/2013	2:34:41 PM	BCl3 valve closed
1/16/2013	2:34:41 PM	PH3 valve closed
1/16/2013	2:34:41 PM	SiCl4 pre valve closed
1/16/2013	2:34:41 PM	SiCl4 post valve closed
1/16/2013	2:34:41 PM	Main Vac valve closed
1/16/2013	2:34:41 PM	Bypass valve closed
1/16/2013	2:34:41 PM	Bubbler valve closed
1/16/2013	2:34:41 PM	Helium MFC set to  0.000000
1/16/2013	2:34:41 PM	H2 MFC set to  0.000000
1/16/2013	2:34:41 PM	BCl3 MFC set to  0.000000
1/16/2013	2:34:41 PM	PH3 MFC set to  0.000000
1/16/2013	2:34:41 PM	SiCl4 MFC set to  0.000000
1/16/2013	2:34:41 PM	Bypass solenoid MFC set to  0.000000
1/16/2013	2:34:41 PM	Tube furnace set to 0
1/16/2013	2:34:44 PM	Helium valve closed
1/16/2013	2:34:44 PM	BCl3 valve closed
1/16/2013	2:34:44 PM	PH3 valve closed
1/16/2013	2:34:44 PM	SiCl4 pre valve closed
1/16/2013	2:34:44 PM	SiCl4 post valve closed
1/16/2013	2:34:44 PM	Main Vac valve closed
1/16/2013	2:34:44 PM	Bypass valve closed
1/16/2013	2:34:44 PM	Bubbler valve closed
1/16/2013	2:34:44 PM	H2 valve opened
1/16/2013	2:34:44 PM	Helium MFC set to  0.000000
1/16/2013	2:34:44 PM	H2 MFC set to  500.000000
1/16/2013	2:34:44 PM	BCl3 MFC set to  0.000000
1/16/2013	2:34:44 PM	PH3 MFC set to  0.000000
1/16/2013	2:34:44 PM	SiCl4 MFC set to  0.000000
1/16/2013	2:34:44 PM	Bypass solenoid MFC set to  0.000000
1/16/2013	2:34:45 PM	Tube furnace set to 0
1/16/2013	2:36:00 PM	Helium valve closed
1/16/2013	2:36:00 PM	BCl3 valve closed
1/16/2013	2:36:00 PM	PH3 valve closed
1/16/2013	2:36:00 PM	SiCl4 pre valve closed
1/16/2013	2:36:00 PM	SiCl4 post valve closed
1/16/2013	2:36:00 PM	Main Vac valve closed
1/16/2013	2:36:00 PM	Bypass valve closed
1/16/2013	2:36:00 PM	H2 valve opened
1/16/2013	2:36:00 PM	Bubbler valve opened
1/16/2013	2:36:00 PM	Helium MFC set to  0.000000
1/16/2013	2:36:00 PM	H2 MFC set to  500.000000
1/16/2013	2:36:00 PM	BCl3 MFC set to  0.000000
1/16/2013	2:36:00 PM	PH3 MFC set to  0.000000
1/16/2013	2:36:00 PM	SiCl4 MFC set to  0.000000
1/16/2013	2:36:00 PM	Bypass solenoid MFC set to  0.000000
1/16/2013	2:36:01 PM	Tube furnace set to 0
1/16/2013	2:36:02 PM	Helium valve closed
1/16/2013	2:36:02 PM	BCl3 valve closed
1/16/2013	2:36:02 PM	PH3 valve closed
1/16/2013	2:36:02 PM	SiCl4 pre valve closed
1/16/2013	2:36:02 PM	SiCl4 post valve closed
1/16/2013	2:36:02 PM	Main Vac valve closed
1/16/2013	2:36:02 PM	Bypass valve closed
1/16/2013	2:36:02 PM	H2 valve opened
1/16/2013	2:36:02 PM	Bubbler valve opened
1/16/2013	2:36:02 PM	Helium MFC set to  0.000000
1/16/2013	2:36:02 PM	H2 MFC set to  500.000000
1/16/2013	2:36:02 PM	BCl3 MFC set to  0.000000
1/16/2013	2:36:02 PM	PH3 MFC set to  0.000000
1/16/2013	2:36:02 PM	SiCl4 MFC set to  0.000000
1/16/2013	2:36:02 PM	Bypass solenoid MFC set to  0.000000
1/16/2013	2:36:02 PM	Tube furnace set to 1000
1/16/2013	2:56:02 PM	Helium valve closed
1/16/2013	2:56:02 PM	PH3 valve closed
1/16/2013	2:56:02 PM	Main Vac valve closed
1/16/2013	2:56:02 PM	Bypass valve closed
1/16/2013	2:56:02 PM	H2 valve opened
1/16/2013	2:56:02 PM	BCl3 valve opened
1/16/2013	2:56:02 PM	SiCl4 pre valve opened
1/16/2013	2:56:02 PM	SiCl4 post valve opened
1/16/2013	2:56:02 PM	Bubbler valve opened
1/16/2013	2:56:02 PM	Helium MFC set to  0.000000
1/16/2013	2:56:02 PM	H2 MFC set to  450.000000
1/16/2013	2:56:02 PM	BCl3 MFC set to  1.300000
1/16/2013	2:56:02 PM	PH3 MFC set to  0.000000
1/16/2013	2:56:02 PM	SiCl4 MFC set to  50.000000
1/16/2013	2:56:02 PM	Bypass solenoid MFC set to  0.000000
1/16/2013	2:56:02 PM	Tube furnace set to 1000
1/16/2013	3:10:02 PM	Helium valve closed
1/16/2013	3:10:02 PM	BCl3 valve closed
1/16/2013	3:10:02 PM	PH3 valve closed
1/16/2013	3:10:02 PM	SiCl4 pre valve closed
1/16/2013	3:10:02 PM	SiCl4 post valve closed
1/16/2013	3:10:02 PM	Main Vac valve closed
1/16/2013	3:10:02 PM	Bypass valve closed
1/16/2013	3:10:02 PM	H2 valve opened
1/16/2013	3:10:02 PM	Bubbler valve opened
1/16/2013	3:10:02 PM	Helium MFC set to  0.000000
1/16/2013	3:10:02 PM	H2 MFC set to  500.000000
1/16/2013	3:10:02 PM	BCl3 MFC set to  0.000000
1/16/2013	3:10:02 PM	PH3 MFC set to  0.000000
1/16/2013	3:10:02 PM	SiCl4 MFC set to  0.000000
1/16/2013	3:10:02 PM	Bypass solenoid MFC set to  0.000000
1/16/2013	3:10:02 PM	Tube furnace set to 750
1/16/2013	3:15:02 PM	H2 valve closed
1/16/2013	3:15:02 PM	BCl3 valve closed
1/16/2013	3:15:02 PM	PH3 valve closed
1/16/2013	3:15:02 PM	SiCl4 pre valve closed
1/16/2013	3:15:02 PM	SiCl4 post valve closed
1/16/2013	3:15:02 PM	Main Vac valve closed
1/16/2013	3:15:02 PM	Bypass valve closed
1/16/2013	3:15:02 PM	Helium valve opened
1/16/2013	3:15:02 PM	Bubbler valve opened
1/16/2013	3:15:02 PM	Helium MFC set to  500.000000
1/16/2013	3:15:02 PM	H2 MFC set to  0.000000
1/16/2013	3:15:02 PM	BCl3 MFC set to  0.000000
1/16/2013	3:15:02 PM	PH3 MFC set to  0.000000
1/16/2013	3:15:02 PM	SiCl4 MFC set to  0.000000
1/16/2013	3:15:02 PM	Bypass solenoid MFC set to  0.000000
1/16/2013	3:15:02 PM	Tube furnace set to 0
1/16/2013	3:35:02 PM	Helium valve closed
1/16/2013	3:35:02 PM	H2 valve closed
1/16/2013	3:35:02 PM	BCl3 valve closed
1/16/2013	3:35:02 PM	PH3 valve closed
1/16/2013	3:35:02 PM	SiCl4 pre valve closed
1/16/2013	3:35:03 PM	SiCl4 post valve closed
1/16/2013	3:35:03 PM	Main Vac valve closed
1/16/2013	3:35:03 PM	Bypass valve closed
1/16/2013	3:35:03 PM	Bubbler valve closed
1/16/2013	3:35:03 PM	Helium MFC set to  0.000000
1/16/2013	3:35:03 PM	H2 MFC set to  0.000000
1/16/2013	3:35:03 PM	BCl3 MFC set to  0.000000
1/16/2013	3:35:03 PM	PH3 MFC set to  0.000000
1/16/2013	3:35:03 PM	SiCl4 MFC set to  0.000000
1/16/2013	3:35:03 PM	Bypass solenoid MFC set to  0.000000
1/16/2013	3:35:03 PM	Tube furnace set to 0
1/16/2013	3:35:04 PM	Run finished at 3:35 PM
1/16/2013	5:22:02 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/16/2013	5:22:02 PM	Recipe started at 5:22 PM
1/16/2013	5:22:02 PM	Helium valve closed
1/16/2013	5:22:02 PM	H2 valve closed
1/16/2013	5:22:02 PM	BCl3 valve closed
1/16/2013	5:22:02 PM	PH3 valve closed
1/16/2013	5:22:02 PM	SiCl4 pre valve closed
1/16/2013	5:22:02 PM	SiCl4 post valve closed
1/16/2013	5:22:02 PM	Main Vac valve closed
1/16/2013	5:22:02 PM	Bubbler valve closed
1/16/2013	5:22:02 PM	Bypass valve opened
1/16/2013	5:22:02 PM	Helium MFC set to  0.000000
1/16/2013	5:22:02 PM	H2 MFC set to  0.000000
1/16/2013	5:22:02 PM	BCl3 MFC set to  0.000000
1/16/2013	5:22:02 PM	PH3 MFC set to  0.000000
1/16/2013	5:22:02 PM	SiCl4 MFC set to  0.000000
1/16/2013	5:22:02 PM	Bypass solenoid MFC set to  0.000000
1/16/2013	5:22:02 PM	Tube furnace set to 0
1/16/2013	5:23:21 PM	Helium valve closed
1/16/2013	5:23:21 PM	H2 valve closed
1/16/2013	5:23:21 PM	BCl3 valve closed
1/16/2013	5:23:21 PM	PH3 valve closed
1/16/2013	5:23:21 PM	SiCl4 pre valve closed
1/16/2013	5:23:21 PM	SiCl4 post valve closed
1/16/2013	5:23:21 PM	Main Vac valve closed
1/16/2013	5:23:21 PM	Bubbler valve closed
1/16/2013	5:23:21 PM	Bypass valve opened
1/16/2013	5:23:21 PM	Helium MFC set to  0.000000
1/16/2013	5:23:21 PM	H2 MFC set to  0.000000
1/16/2013	5:23:21 PM	BCl3 MFC set to  0.000000
1/16/2013	5:23:21 PM	PH3 MFC set to  0.000000
1/16/2013	5:23:21 PM	SiCl4 MFC set to  0.000000
1/16/2013	5:23:21 PM	Bypass solenoid MFC set to  0.000000
1/16/2013	5:23:21 PM	Tube furnace set to 0
1/16/2013	5:24:21 PM	Helium valve closed
1/16/2013	5:24:21 PM	H2 valve closed
1/16/2013	5:24:21 PM	BCl3 valve closed
1/16/2013	5:24:21 PM	PH3 valve closed
1/16/2013	5:24:21 PM	SiCl4 pre valve closed
1/16/2013	5:24:21 PM	SiCl4 post valve closed
1/16/2013	5:24:21 PM	Bypass valve closed
1/16/2013	5:24:21 PM	Bubbler valve closed
1/16/2013	5:24:21 PM	Main Vac valve opened
1/16/2013	5:24:21 PM	Helium MFC set to  0.000000
1/16/2013	5:24:21 PM	H2 MFC set to  0.000000
1/16/2013	5:24:21 PM	BCl3 MFC set to  0.000000
1/16/2013	5:24:21 PM	PH3 MFC set to  0.000000
1/16/2013	5:24:21 PM	SiCl4 MFC set to  0.000000
1/16/2013	5:24:21 PM	Bypass solenoid MFC set to  0.000000
1/16/2013	5:24:21 PM	Tube furnace set to 0
1/16/2013	5:24:22 PM	Run finished at 5:24 PM
1/16/2013	5:24:22 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
